APh/EE 109

Introduction to the Micro/Nanofabrication Lab

9 units (0-6-3)    |  first, second, third terms

Introduction to techniques of micro-and nanofabrication, including solid-state, optical, and microfluidic devices. Students will be trained to use fabrication and characterization equipment available in the applied physics micro- and nanofabrication lab. Topics include Schottky diodes, MOS capacitors, light-emitting diodes, microlenses, microfluidic valves and pumps, atomic force microscopy, scanning electron microscopy, and electron-beam writing.

Instructor: Staff

Please Note

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