Solid-State Electronics for Integrated Circuits
Introduction to solid-state electronics including device fabrication. Topics: semiconductor crystal growth and device fabrication technology, carrier modeling, doping, generation and recombination, pn junction diodes, MOS capacitor and MOS transistor operation, and deviations from ideal behavior. Laboratory includes fabrication and testing of semiconductor devices. Students learn photolithography, the use of vacuum systems, furnaces, analytical microscopy and device-testing equipment.
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