Micro/Nano Technology for Semiconductor and Medical Device
Micro/nano fabrication technologies are useful to make advanced devices such as electronics, optics, sensors and medicine. This course will emphasize the sciences, theories and fundamentals of selected micro/nanofabrication technologies. For example, technologies include wet chemical etching, plasma process, RIE/deep RIE, micro/nano molding and advanced packaging. This course will also cover devices used for sensors and medicine such as pressure sensors, accelerometers/gyros, microfluidics, micro total-analysis system, neuromodulation devices, biomedical implants, etc.