EE/MedE 187

VLSI and ULSI Technology

9 units (3-0-6)    |  second term
Prerequisites: APh/EE 9 ab, EE/APh 180 or instructor's permission.

This course is designed to cover the state-of-the-art micro/nanotechnologies for the fabrication of ULSI including BJT, CMOS, and BiCMOS. Technologies include lithography, diffusion, ion implantation, oxidation, plasma deposition and etching, etc. Topics also include the use of chemistry, thermal dynamics, mechanics, and physics.

Instructor: Tai